8 mirefy SiC Production kilasy wafer 4H-N SiC substrate

Famaritana fohy:

Ny substrate SiC 8-inch dia ampiasaina amin'ny fitaovana elektronika avo lenta, toy ny MOSFET mahery (Metal Oxide Semiconductor Field Effect Transistors), diodes Schottky ary fitaovana semiconductor herinaratra hafa.

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Ity tabilao manaraka ity dia mampiseho ny mari-pamantarana ny 8inch SiC wafers:

8 mirefy N-karazana SiC DSP Specs
isa	zavatra	Unit	Famokarana	Research	Dummy
1: parametra
1.1	polytype	--	4H	4H	4H
1.2	orientation ambonin'ny tany	°	<11-20>4±0.5	<11-20>4±0.5	<11-20>4±0.5
2: Parameter elektrika
2.1	dopant	--	n-karazana azota	n-karazana azota	n-karazana azota
2.2	resistivity	ohm ·cm	0.015~0.025	0.01~0.03	NA
3: Parameter mekanika
3.1	savaivony	mm	200±0.2	200±0.2	200±0.2
3.2	hateviny	μm	500±25	500±25	500±25
3.3	Orientation notch	°	[1- 100]±5	[1- 100]±5	[1- 100]±5
3.4	Notch Depth	mm	1~1.5	1~1.5	1~1.5
3.5	LTV	μm	≤5(10mm * 10mm)	≤5(10mm * 10mm)	≤10(10mm * 10mm)
3.6	TTV	μm	≤10	≤10	≤15
3.7	LOHAN-TSAMBO	μm	-25~25	-45~45	-65~65
3.8	aretina	μm	≤30	≤50	≤70
3.9	afm ny	nm	Ra≤0.2	Ra≤0.2	Ra≤0.2
4: Rafitra
4.1	hakitroky micropipe	ea/cm2	≤2	≤10	≤50
4.2	votoaty metaly	atôma/cm2	≤1E11	≤1E11	NA
4.3	TSD	ea/cm2	≤500	≤1000	NA
4.4	BPD	ea/cm2	≤2000	≤5000	NA
4.5	TED	ea/cm2	≤7000	≤10000	NA
5. kalitao eo anoloana
5.1	anoloana	--	Si	Si	Si
5.2	ambonin`ny farany	--	Si-face CMP	Si-face CMP	Si-face CMP
5.3	sombiny	ea/wafer	≤100 (habe≥0.3μm)	NA	NA
5.4	rangotra, ratra kely	ea/wafer	≤5, Total Length≤200mm	NA	NA
5.5	sisin'ny chips / indents / triatra / tasy / loto	--	tsy misy	tsy misy	NA
5.6	faritra polytype	--	tsy misy	Faritra ≤10%	Faritra ≤30%
5.7	marika eo anoloana	--	tsy misy	tsy misy	tsy misy
6: kalitao miverina
6.1	farany farany	--	C-face MP	C-face MP	C-face MP
6.2	rangotra, ratra kely	mm	NA	NA	NA
6.3	Sisiny lamosina chips / indents	--	tsy misy	tsy misy	NA
6.4	Ny henjana lamosina	nm	Ra≤5	Ra≤5	Ra≤5
6.5	Fanamarihana lamosina	--	Notch	Notch	Notch
7: zohy
7.1	sisin'ny	--	Chamfer	Chamfer	Chamfer
8: Fonosana
8.1	fonosana	--	Epi-vonona amin'ny banga fonosana	Epi-vonona amin'ny banga fonosana	Epi-vonona amin'ny banga fonosana
8.2	fonosana	--	Multi-wafer fonosana kasety	Multi-wafer fonosana kasety	Multi-wafer fonosana kasety