8 mirefy SiC Production kilasy wafer 4H-N SiC substrate

Famaritana fohy:

Ny substrate SiC 8-inch dia ampiasaina amin'ny fitaovana elektronika avo lenta, toy ny MOSFET mahery (Metal Oxide Semiconductor Field Effect Transistors), diodes Schottky ary fitaovana semiconductor herinaratra hafa.

Alefaso mailaka aminay

Product Detail

Tags vokatra

Ity tabilao manaraka ity dia mampiseho ny mari-pamantarana ny 8inch SiC wafers:

8 mirefy N-karazana SiC DSP Specs
isa	zavatra	Unit	Famokarana	Research	Dummy
1: parametra
1.1	polytype	--	4H	4H	4H
1.2	orientation ambonin'ny tany	°	<11-20>4±0.5	<11-20>4±0.5	<11-20>4±0.5
2: Parameter elektrika
2.1	dopant	--	n-karazana azota	n-karazana azota	n-karazana azota
2.2	resistivity	ohm ·cm	0.015~0.025	0.01~0.03	NA
3: Parameter mekanika
3.1	savaivony	mm	200±0.2	200±0.2	200±0.2
3.2	hateviny	μm	500±25	500±25	500±25
3.3	Orientation notch	°	[1- 100]±5	[1- 100]±5	[1- 100]±5
3.4	Notch Depth	mm	1~1.5	1~1.5	1~1.5
3.5	LTV	μm	≤5(10mm * 10mm)	≤5(10mm * 10mm)	≤10(10mm * 10mm)
3.6	TTV	μm	≤10	≤10	≤15
3.7	LOHAN-TSAMBO	μm	-25~25	-45~45	-65~65
3.8	aretina	μm	≤30	≤50	≤70
3.9	afm ny	nm	Ra≤0.2	Ra≤0.2	Ra≤0.2
4: Rafitra
4.1	hakitroky micropipe	ea/cm2	≤2	≤10	≤50
4.2	votoaty metaly	atôma/cm2	≤1E11	≤1E11	NA
4.3	TSD	ea/cm2	≤500	≤1000	NA
4.4	BPD	ea/cm2	≤2000	≤5000	NA
4.5	TED	ea/cm2	≤7000	≤10000	NA
5. kalitao eo anoloana
5.1	anoloana	--	Si	Si	Si
5.2	ambonin`ny farany	--	Si-face CMP	Si-face CMP	Si-face CMP
5.3	sombiny	ea/wafer	≤100 (habe≥0.3μm)	NA	NA
5.4	rangotra, ratra kely	ea/wafer	≤5, Total Length≤200mm	NA	NA
5.5	sisin'ny chips / indents / triatra / tasy / loto	--	tsy misy	tsy misy	NA
5.6	faritra polytype	--	tsy misy	Faritra ≤10%	Faritra ≤30%
5.7	marika eo anoloana	--	tsy misy	tsy misy	tsy misy
6: kalitao miverina
6.1	aoriana farany	--	C-face MP	C-face MP	C-face MP
6.2	rangotra, ratra kely	mm	NA	NA	NA
6.3	Sisiny lamosina chips / indents	--	tsy misy	tsy misy	NA
6.4	Ny henjana lamosina	nm	Ra≤5	Ra≤5	Ra≤5
6.5	Fanamarihana lamosina	--	Notch	Notch	Notch
7: zohy
7.1	sisin'ny	--	Chamfer	Chamfer	Chamfer
8: Fonosana
8.1	fonosana	--	Epi-vonona amin'ny banga fonosana	Epi-vonona amin'ny banga fonosana	Epi-vonona amin'ny banga fonosana
8.2	fonosana	--	Multi-wafer fonosana kasety	Multi-wafer fonosana kasety	Multi-wafer fonosana kasety